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Parker Develops Perfluroinated ULTRA Material FF370-75
(Product News, 08 Aug 2008 )
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Parker Hannifin Corporation has released its Parofluor ULTRA material FF370-75. Formulated for high-purity semiconductor processing up to 608°F, the Parofluor ULTRA material FF370-75 is suited for aggressive oxygen and fluorine plasma applications requiring minimal erosions and particle generation. Purity and unique properties of this opaque black, non-filled FFKM minimize potential for particle generation in oxygen- and fluorine-rich plasmas. Through unique compounding techniques, level of ionic contaminants is also minimized. |
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