Dramatic increase in fab productivity

Asyst Technologies Inc. has introduced Agile Automation, a new approach to Automated Material Handling in semiconductor Fabs. Agile Automation is a “first-of-its-kind” solution for the industry. It enables dramatic increases in fab productivity through modular enhancements to the existing AMHS system. Agile Automation provides the ability to load and unload several tools in parallel while substantially reducing dependency on OHT vehicles. This results in significantly shorter and more predictable FOUP delivery times and dramatic improvements in throughput and tool utilization. Because of its flexible and modular architecture, Agile Automation easily integrates with standard factory automation systems in existing or Greenfield environments. This facilitates a managed, low-risk approach to fab productivity enhancement. Fabs can obtain additional savings through reduced floor space requirements, potentially fewer tools and lower power consumption.

Agile Automation is the result of the integration of Asyst’s advanced hardware, software, and services capabilities, and permits customizable applications that seamlessly integrate within the fab environment via standard industry interfaces. These include the DLT Lifting Loadport for OHT-independent tool loading, a key technology that allows automated loading and unloading of tools independent of a vehicle.